Publications
Journal Paper
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W. C.-Y. Ma, C.-J. Su, K.-H. Kao, et al., “Ferroelectric tunnel thin-film transistor for synaptic applications,” ECS J. Solid State Sci. Technol., 12, 055006, 2023.
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W. C.-Y. Ma, C.-J. Su, K.-H. Kao, et al., “Impacts of pulse conditions on endurance behavior of ferroelectric thin-film transistor non-volatile memory”, Semicond. Sci. Technol., 38, 3, 035020, 2023.
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W.-J. Lee, W.-T. Hsieh, B.-H. Fang, K.-H. Kao* and N.-Y Chen, “Device Simulations with A U-Net Model Predicting Physical Quantities in Two-Dimensional Landscapes”, Sci. Rep., 13, 731, 2023.
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S.-W. Chang, T.-H. Lu, C.-Y. Yang, C.-J. Yeh, M.-K. Huang, C.-F. Meng, P.-J. Chen, T.-H. Chang, Y.-S. Chang, J.-W. Jhu, T.-C. Hong, C.-C. Ke, X.-R. Yu, W.-H. Lu, M. Baig, T.-C. Cho, P.-J. Sung, C.-J. Su, F.-K. Hsueh, B.-Y. Chen, H.-H. Hu, C.-T. Wu, K.-L. Lin, W. C.-Y. Ma, D. Lu, K.-H. Kao, et al., “First Demonstration of Heterogeneous IGZO/Si CFET Monolithic 3-D Integration With Dual Work Function Gate for Ultralow-Power SRAM and RF Applications”, IEEE Trans. Electron Devices, 69, 2101, 2022.
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K. Kumar, C.-H. Lo, C.-C. Chang, T.-L. Wu, K.-H. Kao* and Y. -H. Wang, "Impacts of material parameters on breakdown voltage and location for power MOSFETs," J. Computational Electronics, 21, 1163, 2022.
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K.-H. Kao*, et al., “Linking Room- and Low-Temperature Electrical Performance of MOS Gate Stacks for Cryogenic Applications”, IEEE Electron Device Lett., 43, 674, 2022.
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W. C.-Y. Ma, C.-J. Su, K.-H. Kao, et al., “First demonstration of ferroelectric tunnel thin-film transistor non-volatile memory with polycrystalline-silicon channel and HfZrOx gate dielectric”, IEEE Trans. Electron Devices, 69, 11, 6072, 2022.
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W. C.-Y. Ma, C.-J. Su, K.-H. Kao, et al., “Demonstration of synaptic characteristics of polycrystalline-silicon ferroelectric thin-film transistor for application of neuromorphic computing”, Semicond. Sci. Technol., 37, 4, 045003, 2022.
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S.-W. Tang, Z.-H. Huang, Y.-C. Chen, C.-H. Wu, P.-H. Lin, Z.-C. Chen, M.-H. Lu, K.-H. Kao, and T.-L. Wu, "Investigation of the Passivation-induced VTH Shift in p-GaN HEMTs with Au-free Gate-first Process ," Microelectronics Reliability, 122, 114150, 2021.
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Y. Fang, W.-J. Lee, A.-C. Yang, G.-P. Chen, N.-Y. Chen and K.-H. Kao*, “Inherent Dipole Layer Formation Driven by Surface Energy at Nonplanar Dielectric Interfaces”, IEEE Trans. Electron Devices, 68, 294, 2021.
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T.-H. Yang, C.-J. Su, Y.-S. Wang, K.-H. Kao, et al., "Impact of the Polarization on Time-Dependent Dielectric Breakdown in Ferroelectric Hf0.5Zr0.5O2 on Ge Substrates," J. J. Appl. Phys., 59, SGGB08, 2020.
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K.-H. Kao*, et al., “Subthreshold Swing Saturation of Nanoscale MOSFETs Due to Source-to-Drain Tunneling at Cryogenic Temperatures”, IEEE Electron Device Lett., 41, 1296, 2020.
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P.-J. Sung, S.-W. Chang, K.-H. Kao, et al., “Fabrication of Vertically Stacked Nanosheet Junctionless Filed-Effect Transistors and Applications for the CMOS and CFET Inverters”, IEEE Trans. Electron Devices, 67, 3504, 2020.
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T. H. Yang, C.-J. Su, Y.-S. Wang, K.-H. Kao, et al., “Impact of the Polarization on Time-Dependent Dielectric Breakdown in Ferroelectric Hf0.5Zr0.5O2 on Ge Substrates”, Jpn, J. App. Phys., 59, SGGB08, 2020.
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S.-H. Chen, S.-W. Lian, T.-R. Wu, T.-R. Chang, J.-M. Liou, D. D. Lu, K.-H. Kao*, et al., “Impact of Semiconductor Permittivity Reduction on Electrical Characteristics of Nanoscale MOSFETs”, IEEE Trans. Electron Devices, 66, 2509, 2019.
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K. Kumar, Y.-F. Hsieh, J.-H. Liao, K.-H. Kao*, et al., “Significance of Multivalley and Nonparabolic Band Structure for GeSn TFET Simulation”, IEEE Trans. Electron Devices, 65, 4709, 2018.
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V. Kumar M P, J-Y Lin, K.-H. Kao, et al., “Junctionless FETs with a Fin Body for Multi-VTH and Dynamic Threshold Operation”, IEEE Trans. Electron Devices, 65, 3535, 2018.
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Y.-F. Hsieh, S.-H. Chen, N.-Y. Chen, W.-J. Lee, J.-H. Tsai, C.-N. Chen, M.-H. Chiang, D. D. Lu and K.-H. Kao*, “A FET with a Source Tunneling Barrier Showing Suppressed Short Channel Effects for Low Power Applications”, IEEE Trans. Electron Devices, 65, 855, 2018.
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(Invited) L.-Y. Chen and K.-H. Kao*, “金屬-絕緣層-半導體接面之無摻雜場效應電晶體”, National Nano Device Laboratories (NDL) Communications, 25, 1, 2018.
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S.-S. Chuang, T.-C. Cho, P.-J. Sung, K.-H. Kao, et al., “Ultra-Shallow Junction Formation by Molecular Doping Process in Single Crystalline Si and Ge for Future CMOS Devices”, ECS J. Solid State Science and Tech., 6 (5), 350, 2017.
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V. Kumar M P, C.-Y. Hu, A. M. Walke, K.-H. Kao*, et al., “Improving the Electrical Performance of a Shell Doping Profile Quantum Well Transistor by Heterojunction Optimization”, IEEE Trans. Electron Devices, 64, 3563, 2017.
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L. Y. Chen, Y.-F. Hsieh and K.-H. Kao*, “Undoped and Doped Junctionless FETs: Source/Drain Contacts and Immunity to Random Dopant Fluctuation”, IEEE Electron Device Lett., 38, 708, 2017.
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K.-H. Kao*, et al., “A Dopingless FET with Metal-Insulator-Semiconductor Contacts”, IEEE Electron Device Lett., 38, 5, 2017.
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V. Kumar M P, C.-Y. Hu, K.-H. Kao*, et al., “Impacts of the Shell Doping Profile on the Electrical Characteristics of Junctionless FETs”, IEEE Trans. Electron Devices, 62, 3541, 2015.
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K.-H. Kao*, et al., “Compressively strained SiGe band-to-band tunneling model calibration based on p-i-n diodes and prospect of strained SiGe tunneling field-effect transistors”, J. Appl. Phys., 116, 214506, 2014.
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K.-H. Kao*, et al. “Tensile strained Ge tunnel field-effect transistors: k·p material modeling and numerical device simulation”, J. Appl. Phys., 115, 044505, 2014.
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A. M. Walke, A. Vandooren, R. Rooyackers, D. Leonelli, D. Hikavy, R. Loo, A. S. Verhulst, K.-H. Kao, et al., “Fabrication and analysis of a Si/Si0.55Ge0.45 hetero-junction line tunnel FET”, IEEE Trans. Electron Devices, 61, 707, 2014.
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A. M. Walke, W. G. Vandenberghe, K.-H. Kao, et al., “A simulation study on process sensitivity of a line tunnel field-effect transistor”, IEEE Trans. Electron Devices, vol. 60, 1019, 2013.
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D. Verreck, A. S. Verhulst, K.-H. Kao, et al., “Quantum mechanical performance predictions of p-n-i-n versus pocketed line tunnel field-effect transistors”, IEEE Trans. Electron Devices, 60, 2128, 2013.
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K.-H. Kao*, et al., “Counter-doped pocket thickness optimization of gate-on-source-only tunnel FETs”, IEEE Trans. Electron Devices, 60, 6, 2013.
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K.-H. Kao*, et al., “Optimization of gate-on-source-only tunnel FETs with counter-doped pockets”, IEEE Trans. Electron Devices, 59, 2070, 2012.
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K.-H. Kao*, et al., “Direct and indirect band-to-band tunneling in germanium-based TFETs,” IEEE Trans. Electron Devices, 59, 292, 2012.
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K.-H. Kao*, et al., “Modeling the impact of junction angles in tunnel field-effect transistors”, Solid State Electron., 69, 31, 2012.
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W. G. Vandenberghe, A. S. Verhulst, K.-H. Kao, et al., “A model determining optimal doping concentration and material’s band gap of tunnel field-effect transistors,” Appl. Phys. Lett., 100, 193509, 2012.
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K.-H. Kao, et al., “X-ray photoelectron spectroscopy energy band alignment of spin-on CoTiO3 high-k dielectric prepared by sol-gel spin coating method,” Appl. Phys. Lett., 93, 092907, 2008.
Conference Paper
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W.-C. Lin, H.-P. Huang, K.-H. Kao*, et al., “MOSFET Characterization with Reduced Supply Voltage at Low Temperatures for Power Efficiency Maximization”, IEEE ESSDERC, 2023.
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H.-L. Chiang, R. A. Hadi, J.-F. Wang, H.-C. Han, J.-J. Wu, H.-H. Hsieh, J.-J. Horng, W.-S. Chou, B.-S. Lien, C.-H. Chang, Y.-C. Chen, Y.-H. Wang, T.-C. Chen, J.-C. Liu, Y.-C. Liu, M.-H. Chiang, K.-H. Kao, et al., “How Fault-Tolerant Quantum Computing Benefits from Cryo-CMOS Technology”, VLSI Tech. Dig., accepted, 2023.
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C.-Y. Yang, P.-J. Sung, M.-H. Chuang, C.-W. Chang, Y.-J. Shih, T.-Y. Huang, D. Lu, T.-C. Hong, X.-R. Yu, W.-H. Lu, S.-W. Chang, J.-J. Tsai, M.-K. Huang, T.-C. Cho, Y.-J. Lee, K.-L Luo, C.-T. Wu, C.-J. Su, K.-H. Kao, et al., “First Demonstration of Heterogeneous L-shaped Field Effect Transistor (LFET) for Angstrom Technology Nodes”, IEEE IEDM Tech. Dig., 20.2.1, 2022.
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X.-R. Yu, M.-H. Chuang, S.-W. Chang, W.-H. Chang, T.-C. Hong, C.-H. Chiang, W.-H. Lu, C.-Y. Yang, W.-J. Chen, J.-H. Lin, P.-H. Wu, T.-C. Sun, S. Kola, Y.-S. Yang, Yun Da, P.-J. Sung, C.-T. Wu, T.-C. Cho, G.-L. Luo, K.-H. Kao, et al., “Integration Design and Process of 3-D Heterogeneous 6T SRAM with Double Layer Transferred Ge/2Si CFET and IGZO Pass Gates for 42% Reduced Cell Size”, IEEE IEDM Tech. Dig., 20.5.1, 2022.
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X.-R. Yu, W.-H Chang, T.-C. Hong, P.-J. Sung, A. Agarwal, G.-L. Luo, C.-T. Wu, K.-H. Kao, et al., “First Demonstration of Vertical Stacked Hetero-Oriented n-Ge (111)/p-Ge (100) CFET toward Mobility Balance Engineering”, VLSI Tech. Dig., 399, 2022.
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S.-W. Chang, T.-H. Lu, C.-Y. Yang, C.-J. Yeh, M.-K. Huang, C.-F. Meng, P.-J. Chen, T.-H. Chang, Y.-S. Chang, J.-W. Jhu, T.-Z. Hong, C.-C. Ke, X.-R. Yu, W.-H. Lu, M. A. Baig, T.-C. Cho, P.-J. Sung, C.-J. Su, F.-K. Hsueh, B.-Y. Chen, H.-H. Hu, C.-T. Wu, K.-L. Lin, W. C.-Y. Ma, D.-D. Lu, K.-H. Kao, et al., “First Demonstration of Heterogeneous IGZO/Si CFET Monolithic 3D Integration with Dual Workfunction Gate for Ultra Low-power SRAM and RF Applications”, IEEE IEDM Tech. Dig., 34.4.1, 2021.
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C. J. Su, M. K. Huang, K. S. Lee, V. P. H. Hu, Y. F. Huang, B. C. Zheng, C. H. Yao, N. C. Lin, K. H. Kao, et al., “3D Integration of Vertical-Stacking of MoS2 and Si CMOS Featuring Embedded 2T1R Configuration Demonstrated on Full Wafers”, IEEE IEDM Tech. Dig., 12.2.1, 2020.
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T.-Z. Hong, W.-H. Chang, A. Agarwal, Y.-T. Huang, C.-Y. Yang, T.-Y. Chu, H.-Y. Chao, Y. Chuang, S.-T. Chung, J.-H. Lin, S.-M. Luo, C.-J. Tsai, M.-J. Li, X.-R. Yu, N.-C. Lin, T.-C. Cho, P.-J. Sung, C.-J. Su, G.-L. Luo, F.-K. Hsueh, K.-L. Lin, H. Ishii, T. Irisawa, T. Maeda, C.-T. Wu, W. C.-Y. Ma, D.-D. Lu, K.-H. Kao, et al., “First Demonstration of Heterogeneous Complementary FETs Utilizing Low-Temperature (200 oC) Hetero-Layers Bonding Technique (LT-HBT)”, IEEE IEDM Tech. Dig., 15.5.1, 2020.
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C.-J. Su, P.-J. Sung, K.-H. Kao, et al., “Process and Structure Considerations for the Post FinFET Era”, IEEE SNW, 3.1, 13, 2020.
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S.-W. Chang, et al., “First Demonstration of CMOS Inverter and 6T-SRAM Based on GAA CFETs Structure for 3D-IC Applications”, IEEE IEDM Tech. Dig., 11.7, 2019.
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Y.-T. Tang, C.-L. Fan, Y.-C. Kao, N. Modolo, C.-J. Su, T.-L. Wu, K.-H. Kao, et al., “A Comprehensive Kinetical Modeling of Polymorphic Phase Distribution of Ferroelectric-Dielectrics and Interfacial Energy Effects on Negative Capacitance FETs”, VLSI Tech. Dig., T17-2, 2019.
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P.-J. Sung, C.-J. Su, D. D. Lu, S.-X. Luo, K.-H. Kao, et al., “Fabrication of Ω-gated Negative Capacitance FinFETs and SRAM”, VLSI-TSA, 2019.
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P.-J. Sung, C.-Y. Chang, L.-Y. Chen, K.-H. Kao, et al., “Voltage Transfer Characteristics Matching by Different Nanosheet Layer Numbers of Vertically Stacked Junctionless CMOS Inverter for SoP/3D-ICs Application”, IEEE IEDM Tech. Dig., 21.4, 2018.
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Y.-T. Tang, C.-J. Su, Y.-S. Wang, K.-H. Kao, et al., “A Comprehensive Study of Polymorphic Phase Distribution of Ferroelectric-Dielectrics and Interfacial Layer Effects on Negative Capacitance FETs for Sub-5nm Node”, VLSI Tech. Dig., 45, 2018.
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Yu Fang, W.-J. Lee, L.-Y. Chen, N.-Y. Chen, J.-H. Tsai and K.-H. Kao, "Molecular Dynamics Simulations of Dipole Layer Formation in Gate-All-Around Structure", IEEE SNW, 2-31, 2018.
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L.-Y. Chen, Ankit Agarwal, Yu Fang, S.-H. Chen and K.-H. Kao, "Dopingless Si Nanowire Transistor", International Congress of Engineering and Information, Accepted, 2018.
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C.-J. Su, T.-C. Hong, Y.-C. Tsou, F.-J. Hou, P.-J. Sung, M.-S. Yeh, C.-C. Wan, K.-H. Kao, et al., “Ge Nanowire FETs with HfZrOx Ferroelectric Gate Stack Exhibiting SS of Sub-60 mV/dec and Biasing Effects on Ferroelectric Reliability” IEEE IEDM Tech. Dig., 15.4, 2017.
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C.-J. Su, Y.-T. Tang, Y.-C. Tsou, P.-J. Sung, F.-J. Hou, C.-J. Wang, S.-T. Chung, C.-Y. Hsieh, Y.-S. Yeh, F.-K. Hsueh, K.-H. Kao, et al., “Nano-scaled Ge FinFETs with Low Temperature Ferroelectric HfZrOx on Specific Interfacial Layers Exhibiting 65% S.S. Reduction and Improved ION” VLSI Tech. Dig., T12-1, 2017.
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L.-Y. Chen, Y.-F. Hsieh and K.-H. Kao, “Undoped SiGe FETs with Metal-Insulator-Semiconductor Contacts”, IEEE SNW, 5-33, 2017.
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Y.-J. Lee, T.-C. Hong, F.-K. Hsueh, P.-J. Sung, C.-Y. Chen, S.-S. Chang, T.-C. Cho, S. Noda, Y.-C. Tsou, K.-H. Kao, et al., “High Performance Complementary Ge Peaking FinFETs by Room Temperature Neutral Beam Oxidation for Sub-7 nm Technology Node Applications”, IEEE IEDM Tech. Dig., 33.5, 2016.
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Y.-J. Lee, F.-J. Hou, S.-S. Chang, F.-K. Hsueh, K.-H. Kao, et al., “Diamond-shaped Ge and Ge0.9Si0.1 Gate-All-Around Nanowire FETs with Four {111} Facets by Dry Etch Technology”, IEEE IEDM Tech. Dig., 15.1, 2015.
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Y.-J. Lee, T.-C. Cho, P.-J Sung, K.-H. Kao, et al., “High Performance Poly Si Junctionless Transistors with Sub-5nm Conformally Doped Layers by Molecular Monolayer Doping and Microwave Incorporating CO2 Laser Annealing for 3D Stacked ICs Applications”, IEEE IEDM Tech. Dig., 6.2, 2015.
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Y.-J. Lee, T.-C. Cho, K.-H. Kao, et al., “A Novel Junctionless FinFET Structure with sub-5nm Shell Doping Profile by Molecular Monolayer Doping and Microwave Annealing”, IEEE IEDM Tech. Dig., 32.7, 2014.
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A. S. Verhulst, D. Verreck, Q. Smets, K.-H. Kao, et al., “Perspective of Tunnel-FET for Future Low-Power Technology Nodes”, IEEE IEDM Tech. Dig., 30.2, 2014 (invited).
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Q. Smets, A. S. Verhulst, R. Rooyackers, C. Merckling, D. Lin, E. Simoen, A. Alian, M. Cantoro, A. Pourghaderi, K.-H. Kao, et al., “InGaAs diodes for band-to-band tunneling calibration and n- and p- lineTFET performance prediction”, SSDM, 752-753, 2013.
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A. S. Verhulst, W. G. Vandenberghe, K.-H. Kao, et al., “Tunnel field-effect transistors for low-power nano-electronics”, 2013 9th international nanotechnology conference on communication and cooperation, Berlin, Germany.
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A. Vandooren, A. S. Verhulst, R. Rooyackers, A. M. Walke, K.-H. Kao, et al., “Trends and challenges in tunnel field effect transistors”, “2013 7th international workshop “functional nanomaterials and devices for electronics, sensors, energy harvesting”, Ukraine.
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K.-H. Kao, et al., “SiGe band-to-band tunneling calibration based on p-i-n diodes: fabrication, measurement and simulation”, ECS Transactions, 50, 965-970, 2012.
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K.-H. Kao, et al., “The impact of junction angle on tunnel FETs”, Proceedings of Ultimate Integration on Silicon (ULIS), p. 80-83, 2011.
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A. S. Verhulst, W. G. Vandenberghe, D. Leonelli, R. Rooyackers, A. Vandooren, J. Zhuge, K.-H. Kao, et al., “Si-based tunnel field-effect transistors for low-power nano-electronics”, DRC, 193, 2011.
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W.-C. Wu, C.-S. Lai, S.-C. Lee, M.-W. Ma, T.-S. Chao, J.-C. Wang, C.-W. Hsu, P.-C. Chou, J.-H. Chen, K.-H. Kao, et al., “Fluorinated HfO2 Gate Dielectrics Engineering for CMOS by pre- and post-CF4 Plasma Passivation,” IEDM Tech. Dig., 405, 2008.
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K.-H. Kao, et al., “Characterization of CoTiO3 Thin Films Formed by Sol-Gel Spin Coating with High Temperature Annealing”, SNDT 2007 Symposium on Nano Device Technology, Taiwan.